Abstract

Highly performance of flexible transparent conductive Cu-based ZnO multilayer thin films are achieved by barrier layer of amorphous thin films based on barium stannate. The flexible multilayers exhibit high figure of merit (FoM) of 20.38 × 10−3 Ω−1 with the sheet resistance of 6.19 Ω/sq. and resistivity of 5.28 × 10−5 Ω cm, while the average optical transmittance is about 81.3% in the visible range. The FoM value is the highest among all the reported Cu-based transparent conductive thin films. The influence mechanism of BS barrier layers on electrical and optical properties of the multilayers is also proposed. Our results demonstrate that BS barrier layer is an effective way in tuning/improving the optical and electrical performances in the Cu-based ZnO multilayer thin films.

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