Abstract
Highly ordered anodic porous alumina with a period of ca. 90–160 nm was prepared by anodization using extremely dilute sulfuric acid. The hole period of anodic porous alumina was controllable in the range of 90–160 nm by changing the anodization voltage. The thickness of the oxide film obtained by the anodization of Al in extremely dilute sulfuric acid was nonuniform. However, we found that the addition of a small amount of phosphoric acid to the electrolyte improved the uniformity of the thickness of the oxide film obtained. The ordered anodic porous alumina obtained in this study is expected to be a starting material for fabricating various functional devices.
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