Abstract
Electrical properties of RF magnetron sputtered SrTiO/sub 3/ (STO) thin films have been studied in view of application to diminish the influence of electro-magnetic noise to automobile IC. STO films with Ti rich composition (Ti/Sr=1.2) have high breakdown field of Ebd=2 MV/cm and high dielectric constant of /spl epsi//sub r/=140 up to frequency region of 2 GHz. In addition, characterization by TEM observation of STO films thus formed revealed that the films have complex columnar structure, which includes crystal grains and amorphous layers. Electrical properties of STO films obtained in this study can be explained in terms of the coexistence of crystal grains and amorphous layers.
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