Abstract
Die attach materials for most MEMS packages must be highly flexible as temperature changes during the assembly process and application may lead to thermo-mechanical stress as a consequence of dissimilar coefficients of thermal expansion of substrate, chip and adhesive. Thermo-mechanical stress results in a distortion of the signal characteristics of the extremely stress-sensitive MEMS device. Within the scope of this paper, highly flexible heat-curing adhesives with a Young's modulus down to 5 MPa (0.725 ksi) at room temperature were developed. DMTA measurements show that temperature storage at +120 °C (+248 °F) does not cause the adhesive to embrittle, which would have a negative effect on the MEMS package's reliability. After storage at +120 °C (+248 °F) for up to 1000 h, no increase in Young's modulus can be observed. The adhesives cure at extremely low temperatures down to +100 °C (+212 °F), which reduces stress development during the assembly process. In addition, the adhesives have very process-friendly properties. Processing times of more than one week can be achieved. The option of dual curing enables preliminary light fixation of the chip within just seconds.
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