Abstract

Herein, we present a facile method to fabricate transparent, flexible, and high-performance thin-film heaters (TTFHs) based on nanostructured micromesh (NSMM) Cu–Ag/indium tin oxide bilayer transparent thin-film electrodes (TTFEs) with both nano- and microstructures. Our approach combines Ar-assisted thermal evaporation and pulsed laser ablation techniques to fabricate NSMM TTFEs with a low sheet resistance (∼2.1 Ω/sq) and high optical transmittance (∼80.1 %). By adjusting the spacing of microholes, we can achieve excellent figure of merit values (∼51.8 × 10−3 Ω−1) for the NSMM TTFEs. These electrodes also show excellent durability and flexibility, as evidenced by a resistance change of only 4 %–18 % in cyclic bending tests with up to 200,000 cycles. Finally, we demonstrate that the NSMM TTFEs can be used as high-performance TTFHs with short response times (3.97 s at a steady temperature of 87.5 °C under low-voltage operation (5 V)) and infrared shielding properties. Our results suggest that the Cu–Ag-alloy-based NSMM TTFEs are promising transparent electrodes for various applications in flexible electronics, smart windows, and wearable devices.

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