Abstract
This work explores an easy and efficient approach for developing NO2 gas sensors based on one-step sputtered nanocrystalline molybdenum trioxide (nc-MoO3). The sample’s morphology, crystallinity, and purity were analyzed using FESEM, XRD, and XPS, respectively. The MoO3 thin film sensor displayed its highest sensor response (SR = Rg/Ra) of ∼ 9.15 when exposed to 200 ppm of NO2 gas at the optimal operating temperature of 300℃, with response and recovery times of about 114 and 106 s, respectively. The sensor also displayed high selectivity and stability. With the expeditious approach and outstanding performance, the sputtered bare MoO3 thin films can be used for sparing NO2 gas detection.
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