Abstract
The efficiency of the thermoelectric materials and devices is shown by the dimensionless Figure of merit, ZT. ZT is calculated by multiplying the Seebeck coefficient with square of the electrical conductivity and absolute temperature and dividing it all by the thermal conductivity. Thermoelectric devices were prepared using different multilayered thin film structures in the order of SiO2/SiO2 + Ge/Ge/Sb + Ge/Si/Si + Ge/Ge/Ge + Si by DC/RF Magnetron Sputtering. The prepared thermoelectric devices have been tailored with 5 MeV Si ions bombardment at the different fluences (doses) to form quantum structures in the multilayer thin films to improve the efficiency of the thermoelectric devices. Seebeck coefficients, van der Pauw-four probe resistivity, Hall Effect coefficient, density and mobility have been measured. After the samples were prepared, SEM/EDS data were collected. FIB/SEM images were provided to figure out the cross-section of the fabricated devices. Seebeck coefficients and electrical resistivity results were affected positively if the appropriate ion beam dose was selected.
Highlights
Thermoelectric materials could convert the heat energy to electrical energy directly (Li et al, 2016)
The Seebeck coefficients have been measured for the prepared devices from the different multilayer thin films
FIB milled Scanning Electron Microscopy (SEM) images show that the thickness measurement system used during the characterization is compatible with the result of crosssection images of FIB milled SEM images
Summary
Thermoelectric materials could convert the heat energy to electrical energy directly (Li et al, 2016). Thermoelectric devices took an important role due to their applications in our life in many areas. Thermoelectric materials were founded in the 19th century. In 1821, Thomas Seebeck performed the first discovery on the thermoelectric materials while he was watching the deviation of the needle placed in the circuit formed by two unlike metal conductors. Seebeck found that the deflection of the needle was proportionally affected by the change of the temperature. He found that the temperature change across the unlike metals produced an electric current
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