Abstract
The authors describe the design procedure of a highly efficient waveguide p-i-n photodiode. The efficiency of the waveguide InP/InGaAsP ( lambda /sub g/=1.3 mu m)/InGaAs/InGaAsP ( lambda /sub g/=1.3 mu m)/InP p-i-n photodiode is calculated using the step-segment method and overlap-integral between the optical field of a fiber and that of the photodiode. A remarkably high coupling efficiency to a fiber can be obtained by using a multimode waveguide structure. The fabricated device has an external quantum efficiency of 68% as well as 3 dB bandwidth of higher than 40 GHz at a 1.55 mu m wavelength.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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