Abstract
We have used silicon technologies to build highly dense phased array for X to W-band applications. Typical designs include an 8-element 8-16 GHz SiGe phased array receiver, a 16-element 30-50 GHz SiGe transmit phased array, a miniature (<; 3mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) and low power (<;100 mW) CMOS phased array receiver at 24 GHz, and a 4-element SiGe/CMOS Tx/Rx phased array at 34-38 GHz with 5-bit amplitude and phase control, a 2-antenna 4-simultaneous beam phased array chip at 15 GHz. Also, a miniature 8×8 Butler Matrix with <; 3 dB loss in 0.13 um CMOS has been developed for multibeam applications. It is shown that silicon chips can be used to lower the cost of phased arrays with a significant impact at Ku, K and W-band applications where there is so little available space behind each antenna element due to the very small element area.
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