Highly charged ion beams from the Tokyo EBITfor applications to nano-science and -technology

Abstract

We report present status of a beam line for transportation of highly charged ions(HCIs) extracted from the Tokyo EBIT. We have produced continuous beams of 2.5 × 105 cps forXe44+ through a 1 mm aperture. With slightly high energy operation (electron beam energy: 78keV) of the Tokyo EBIT, we have also obtained 103 ions/pulse for Ta70+ HCIs extracted by apulse mode (trapping time: 3 sec). We are going to apply such HCI beams to nano-processes onsolid surfaces by utilizing some useful characteristics of the HCI-interactions. Future perspectiveof HCI-based nano-science and -technology is presented.