Abstract
A highly a-oriented SrBi 2Ta 2O 9 thin film with a polycrystalline structure was deposited on a preferentially oriented (111) Pt/TiO 2/SiO 2/Si substrate by eclipse pulsed laser deposition (PLD) method. The SrBi 2Ta 2O 9 thin film exhibited flat and smooth surface with the surface roughness of about 0.5 nm resulting from reducing particulates generated by on-axis PLD. The SrBi 2Ta 2O 9 thin film showed a good ferroelectric property with the high remanent polarization of 12 μC/cm 2 and the low coercive electric field of 140 kV/cm. For the highly a-oriented SBT thin film, domain switching and reading were performed by Kelvin probe force microscope (KFM). The KFM data indicate a good ferroelectric property of the highly a-oriented SrBi 2Ta 2O 9 thin film with high KFM signals that reflect ferroelectric polarizations.
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