Highly (1 0 0)-textured Pb(Zr 0.52Ti 0.48)O 3 film derived from a modified sol–gel technique using inorganic zirconium precursor

Abstract

Highly (1 0 0)-textured Pb(Zr 0.52Ti 0.48)O 3 films have been prepared on platinized silicon substrate by a modified sol–gel technique using inorganic zirconium precursor. The X-ray diffraction analysis on the crystallinity and texture evolution of sol–gel lead zirconate titanate (PZT) films revealed that the films were well crystallized to perovskite phase when annealed at 550 °C, and that highly (1 0 0) preferred orientation dominated in the PZT films after annealed at 650 °C. The (1 0 0)-oriented PZT film exhibited the remnant polarization of 26.3 μC/cm 2 and the coercive field of 100 kV/cm.