Abstract
This digest paper describes experimental demonstration of high-frequency silicon carbide (SiC) microdisk resonators operating in aquatic environments, including water and water solutions of H 2 O 2 and NH 4 OH. We demonstrate, for the first time, that center-clamped circular SiC microdisks can preserve multiple robust flexural-mode resonances in water. We have observed strong multimode responses in the SiC microdisks, up to more than a dozen resonance modes, with resonance frequencies up to ~120MHz and quality (Q) factors up to ~800 in air, and up to 9 resonances in the range of 1-120MHz with Qs up to ~35 in water. Both the number of modes and the Q values are the highest among reported flexur-al-mode resonators measure in water. We also explore how geometrically defected microdisks in an `eclipsed moon' structure are affected, by comparing their multimode resonance characteristics to those of the `full moon' structures. We further demonstrate the operations of the SiC microdisk resonators in hydrogen peroxide (H 2 O 2 ) and ammonium hydroxide (NH 4 OH) solutions, and by examining 2 resonance modes, we have observed linear relationship between the frequency shift and the solution mass density, in both modes.
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