Abstract
A simple apparatus which measures the complex permeability of soft magnetic thin films is described. A continuous frequency spectrum from 100 kHz to 200 MHz is measured with high accuracy (1 mu m) in permeance by averaging the repeated scanning data to increase the signal-to-noise ratio. The relationship between the anisotropy field and the permeability is studied for Co-based amorphous soft magnetic thin films with various uniaxial anisotropy fields by using this apparatus. The high-frequency permeability shows a rapid drop from a much lower frequency than that estimated by a classical eddy current theory. From an analysis of the permeability spectrum, the frequency, which takes the maximum value in the imaginary part of the permeability, seems to correspond to the natural ferromagnetic resonance frequency. It is concluded that the main cause for the drop in the permeability in the high-frequency region is the natural ferromagnetic resonance of uniaxially anisotropic soft magnetic thin films.
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