Abstract
The characteristics of an electron beam excited ArF laser amplifier were investigated from the small-signal region to the strongly saturated region (≥10 MW/cm2) as a function of Ar concentration. A single-pass (L=50 cm) amplifier experiment was performed with atmospheric Ar/F2 and Ne/Ar/F2 gas mixtures pumped by an intense electron beam (1.3 MV, 90 kA, 65 ns full width half-maximum). The extracted intensity (output intensity minus input intensity) from this single-pass amplifier was maximized at input intensities ranging from 6.7 to 9.5 MW/cm2. The power efficiencies obtained were 13, 14.4, and 15.7%, and the extraction efficiencies were 65, 59.7, and 59.4% for Ar concentrations of 40, 70, and 99.6%, respectively. The amplifier parameters (small-signal gain g0, nonsaturable absorption coefficient α, and saturated intensity Is) were estimated for each mixture using a Rigrod analysis [J. Appl. Phys. 36, 2487 (1965)].
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