Abstract
Me-C:H coatings have been successfully applied in recent years to reduce wear of precision components, mainly for automotive parts. Coating of precision components requires a high volume throughput, high process reliability and lower costs to fulfil the price demands of customers. In general, the W-C:H coating is deposited by reactive sputtering in a batch system, wherein up to 50% of the production costs are determined by the process costs. The main disadvantages of a batch system are the time-consuming and non-productive process steps like pumping and venting of the vessel, conditioning of the substrate surface prior to coating and cooling of the substrates. Therefore, a cluster-type in-line machine concept was developed with dedicated process chambers that allows deposition of coatings with high throughput at low costs of ownership. The prototype of the machine and first results are presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
