Abstract
Plasma is the fourth state of matter. High temperature is essential to sustain the plasma in ionic form. The RF heating system used to provide the required temperature may get damaged due to occurrence of arcing. Series switch (circuit breaker) is one of the most effective and efficient methods of protecting RF generators. The series switch must be operated within stipulated time after the occurrence of electric fault and therefore the triggering circuit of series switch must be designed carefully to obtain optimum results. This paper presents the designs of high voltage series switch and crowbar circuit developed for the protection of RF heating system. An optimum triggering scheme is designed to obtain the triggering with the delay of only 4.8 μS as compared to the safety margin of 10 μS. The importance of optical triggering and utilization of fiber optic has been justified. The designs are well supported with the experimental results.
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