Abstract

Thin films of LiNi0.5Mn1.5O4 were prepared on stainless steel substrates using reactive radio-frequency sputtering method. The crystallinity of the post-annealed films at different temperatures after deposition at room temperature was studied, using XRD. Electrochemical properties of LiNi0.5Mn1.5O4 thin film cathodes were investigated using charge/discharge voltage curve against a lithium foil anode. The crystallinity and the electrochemical characteristics of post-annealed temperature are not consistent with each other. Among them, the best electrochemical characteristics were obtained at 600°C. To further analyze the reason, additional SIMS measurement was performed.

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