Abstract
This study investigated the fracture properties of hydrogenated amorphous silicon carbids (a-SiC:H) thin films for NEMS/MEMS. Fracture energy of these films decreased with decreasing Young's modulus. However, we found a surprisingly high fracture energy of a low Young's modulus film, which was rationalized by the onset of plasticity. These films exhibited little sensitivity to moisture-assisted cracking significantly different from silica based materials, which will be a significant advantage of a-SiC:H films for applications employed in harsh environments.
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