Abstract
High-throughput method of three targets magnetron sputter co-deposition was adopted to prepare (Nb–Ti)1-x-ySixCry composition spread alloy film (CSAF). Early oxidation behavior of the as-deposited alloy thin film was investigated in atmospheric conditions at 1250 °C for 10 min. A (Nb–Ti)1-x-ySixCry combinatorial material library covering (9.34–32.31) Si-(10.43–20.27) Cr (at. %) is obtained and as-deposited film was composed of amorphous phase. The oxidized film was separated into three regions having different oxidation products. The composition range for establishment of a protective scale (SiO2 and CrNbO4) and a small amount of Nb2O5 was ascertained efficiently across the entire alloy thin film.
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