Abstract
Various infra-red and planar chiral metamaterials were fabricated using the modified Nanospherical-Lens Lithography. By replacing the light source with a hand-held ultraviolet lamp, its asymmetric light emission pattern produces the elliptical-shaped photoresist holes after passing through the spheres. The long axis of the ellipse is parallel to the lamp direction. The fabricated ellipse arrays exhibit localized surface plasmon resonance in mid-infra-red and are ideal platforms for surface enhanced infra-red absorption (SEIRA). We also demonstrate a way to design and fabricate complicated patterns by tuning parameters in each exposure step. This method is both high-throughput and low-cost, which is a powerful tool for future infra-red metamaterials applications.
Highlights
Various infra-red and planar chiral metamaterials were fabricated using the modified Nanospherical-Lens Lithography
Metamaterials (MMs) are artificial materials which consist of sub-wavelength elements and their spatially averaged response can be recognized as a homogeneous medium with a characteristic effective permittivity (e) and permeability (m)[1,2]
Asymmetric nano-cross arrays have been reported to work as quarter wave monopole antenna elements which are compatible with chip-based fabrication techniques[17]
Summary
Various infra-red and planar chiral metamaterials were fabricated using the modified Nanospherical-Lens Lithography. We demonstrate a way to design and fabricate complicated patterns by tuning parameters in each exposure step This method is both high-throughput and low-cost, which is a powerful tool for future infra-red metamaterials applications. When illuminated the metal nanoparticles with resonant light that matches their localized surface plasmon resonance (LSPR), strong electric field occurs near the surface and is useful to boost the Raman scattering signal for ultrasensitive surface-enhanced Raman scattering (SERS) measurements[22] and the absorption signal from the vibrational modes of molecules for surface-enhanced IR absorption (SEIRA) spectroscopy Both techniques can reveal the vibrational fingerprints of bio-molecules. SEIRA has been demonstrated from engineered metal nanostructures, such as nano-shells[25], nano-crescents[26], and nano-bars[27,28] These nanostructures exhibit uniform size distributions and can be arranged periodically on top of a surface. The micro-/nanospheres were reported to be used for micro-/nano- fabrication and imaging[52,53]
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