Abstract
In transmission electron microscopy (TEM) for biological and polymer samples, it is difficult to image with high contrast, since they are mostly composed of light elements and have similar density. One solution to enhance the contrast is utilization of phase contrast microscopy, which is realized in optical microscopy. Accordingly, many types of phase plates for electron microscopy have been proposed. Zernike phase contrast TEM (ZPC-TEM) with a Zernike phase plate (ZPP) provides higher contrast at Af (defocus) = 0 with respect to one in conventional TEM [1]. ZPC-TEM attracts much attention in Cryo-TEM applications such as cryo-electron tomography and single-particle analysis [2], because their specimens are easy to be damaged with electrons and they need high contrast with minimum dose on the specimen.
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