Abstract
A high throughput electron beam recorder (EBR) consisting of arrayed microcolumns is proposed to produce much higher density pit patterns with high speed recording. Since the next-generation optical disk system using blue laser diodes is introduced', a random access memory (RAM) disc of 25 GB or higher in compact disc (CD) or digital versatile disc (DVD) is actively studied. High-density mastering is the key technoIogy to manufacture next-generation optical discs with more than 25 GBI layer capacity discs for more than 2 h of HDTV digital data. For realization of such a highdensity optical disk, electron-beam mastering systems with conventional electron beam lithography are developing as a new mastering technique in order to fabricate a glass master with small pits and narrow grooves2. However, the EBRs still have the low throughput issue as a conventional lithography.
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