Abstract
Reflection sliced multilayer gratings with 4900 grooves/mm and number of periods N=500 have been produced by sputter-slice technique. Spectra of laser produced plasma of aluminum in the range of 124–250 Å have been recorded with a spectral resolution of about 300 in the first order. Comparison with a high resolution spectrum obtained with a conventional spectrograph and theoretical calculations of the diffraction efficiency is given.
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