Abstract
I studied sensors using carbon nanotubes (CNTs) powered by van der Waals forces with the objective of developing a pressure sensor that can work in harsh environments. To achieve this, the deformation of CNTs was investigated under vacuum. The sensitivity of developed sensors increased with an increase in the temperature. The sensors with single-wall CNTs were more sensitive than the ones with multi-wall CNTs with reasonable repeatability. I interpreted previous theoretical reports on the deformation of CNTs at metal interconnections using the results and suggested that the deformation primarily depended on temperature.
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