Abstract
Summary form only given, as follows. A plasma based ion implantation (PBII) system has been studied to achieved a uniform ion implantation to a three-dimensional workpiece. The gas plasma has been used to improve anti-corrosion and tribological properties. In order to expand the application area of PBII, a metal plasma source has been investigated for the surface modification in several materials. Ion implantation has been utilized as an effective method for improving the oxidation behavior of TiAl alloys However, metal plasma-based ion implantation (Me-PBII) has some problems such as film deposition during ion implantation. Recently, we have developed the Me-PBII system with a pulse arc source to reduce the film deposition. In this study, the improvement of the oxidation resistance of TiAl alloy is reported by Me-PBII.
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