Abstract
A SiO 2 protective coating was deposited on an IN738LC alloy using CCVD. The physical properties of a SiO 2 protective layer are influenced by the amount of tetraethyl orthosilicate (TEOS, C 8H 20O 4Si). Therefore, the SiO 2 protective coating was deposited using different TEOS concentrations and deposition times to optimize the conditions. The deposited coating layer was confirmed to be a SiO 2 layer by SEM, EDX, and ESCA analyses. The oxidation resistance of the alloy was evaluated by thermo gravimetric analysis. The oxidation resistance of the SiO 2 protective coating was highest when the coating was processed at a TEOS concentration of 0.05 mol/l, which is the highest concentration of source material used. The surface roughness of the SiO 2 protective layer also increased with increasing TEOS concentration. The surface roughness of the coating had little effect on the oxidation resistance for a film thickness of approximately 1 μm.
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