High‐temperature multilayer actuators based on CuO added BiScO3–PbTiO3 piezoceramics and Ag electrodes

Abstract

AbstractHigh‐temperature multilayer actuators based on Cu doping 0.367BiScO3–0.633PbTiO3 ceramic slices and Ag electrodes were prepared by low‐temperature co‐firing technology. The 0.3 wt% CuO addition has effectively reduced the sintering temperature of the ceramic from ~1080 to 930°C, thus the multilayer actuator were sintered at 930°C which is lower than the Ag melting point, that is, 961°C. The 4.3 mm thick multilayer actuator is composed of a series of ~44‐μm‐thick ceramic slices and ~2‐μm‐thick Ag electrodes. As a result, a ≥0.13% strain with nm‐scale preciseness can be produced in the actuator by 200 V driving voltage not only at room temperature but also at a high temperature up to 200°C. This actuator is essential for industrial machinery that requires nm‐scale position control at 20‐200°C.