Abstract
Topology of high-symmetry thin-film SQUIDs based on the Nb/AlO x /Nb tunneling junctions is developed and optimized. The devices exhibit relatively low sensitivity to static external field and electric interference. An experimentally implemented SQUID sensor with an integrated input coil with a sensitivity of 0.26 μA/Ф0 exhibits an intrinsic noise with respect to magnetic flux of less than $$5\mu {\Phi _0}/\sqrt {Hz} $$ . A system for encapsulation of sensors is developed for applications in multichannel systems for nondestructive evaluation of materials and alternative diagnostic systems.
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