Abstract
Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al0.3CoCrFeNi HEATFs with a thickness of ~4 μm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.
Highlights
It is well known that among all the alloy composition design systems, high-entropy alloys (HEAs) are a brand-new concept based on novel multi-component system composition designs
The chemical composition of HEAs contains multiple elements which would naturally raise the cost for industrial application, and limit HEAs extensive development
The previous work has greatly promoted the industrial application of high-entropy alloy thin films (HEATFs)
Summary
It is well known that among all the alloy composition design systems, high-entropy alloys (HEAs) are a brand-new concept based on novel multi-component system composition designs They contain at least four or five principal metal components and form a single face-centered cubic (FCC), body-centered cubic (BCC) or hexagonal close-packed (HCP) phase [1–6]. To reduce the cost for future industrial applications and take full advantage of the above excellent comprehensive properties, HEA thin films (HEATFs) can be efficiently prepared and simultaneously coated on the surface of industrial components, especially for those complex geometry components. In these cases, the HEATFs will play an important role. In this study we prepared the Al0.3 CoCrFeNi HEATFs with a main simple FCC structure by magnetron sputtering, and fabricated nano-scaled pillars on the surface of the thin film by focus ion beams (FIBs), utilized in situ scanning electron microscopy (SEM) compression to study the deformation behaviors of the HEATFs
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