Abstract

A high-speed waveguide photodetector has been successfully fabricated for an integrated coherent receiver. Dual laterally tapered structures are introduced for a spot-size converter. We optimize the responsivity and the polarization-dependent loss of the spot-size converter-integrated waveguide photodetector through the beam propagation method simulation. The waveguide photodetector is designed with electrical as well as optical optimizations. The photodetector provides sufficient alignment tolerance, high responsivity of 0.73A/W, and low polarization-dependent loss of 0.27dB, which is in good agreement with the simulation results. By increasing the thickness of the matching layer and the n-doped upper taper, the electrical properties of the photodetector are enhanced. The photodetector has a 3dB bandwidth of 45GHz, providing high-speed operation. Through the electrical and optical optimizations, we successfully obtain the high-speed waveguide photodetector for a 64Gbaud integrated coherent receiver.

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