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Abstract
A high speed in acquisition of backscatter Kikuchi patterns (BKP) and solving the stored raw patterns offline has many advantages over online EBSD. No compromise is made between speed and reliability. Automated backscatter Kikuchi diffraction in the scanning electron microscope (SEM) is about to become a tool for process and quality control. Mandatory requirements for these applications are measures to enable re-examination of the results at any time and a high speed. Therefore, fast acquisition of pattern sequences and off¬line indexing will soon become standard. Online pattern solving is optional, but at the disadvantage of reduced speed and reliability.
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