High–Speed Laser Modulation for Low–Noise Micro–Cantilever Array Deflection Measurement

Abstract

In this paper, an innovative approach is introduced to address the noise issues associated with micro–cantilever array deflection measurement systems employing multiple lasers. Conventional systems are affected by laser mode hopping during switching, resulting in wavelength instability and beam spot fluctuations that take several hundred milliseconds to stabilize. To mitigate these limitations, a high–speed laser modulation technique is utilized, leveraging the averaging effect over multiple modulation cycles within the sampling window. By driving the lasers with a high–frequency carrier signal, a low–noise and stable output suitable for micro–cantilever beam deflection measurement is achieved. The effectiveness of this approach is demonstrated by simultaneously modulating the lasers and rapidly observing the spectral and centroid variations during high–speed switching using a custom–built high–speed spectrometer. The centroid fluctuations are also analyzed under different modulation frequencies. The experimental results confirm that the high–speed modulation method can reduce the standard deviation of beam spot fluctuations by more than 90%, leading to significant improvements in noise reduction compared to traditional laser switching methods. The proposed high–speed laser modulation approach offers a promising solution for enhancing the precision and stability of multi–laser micro–cantilever array deflection measurement systems.