High Speed Laser Micro Processing Using High Brilliance Continuous Wave Laser Radiation

Abstract

Laser micro processing using a high power single-mode continuous wave fibre laser in combina-tion with a fast galvanometer scanner as well as an ultra fast polygon scan systems was investigated. As a key technology in high rate laser ablation a maximum laser power up to 3 kW and scan speeds up to 18,000 m/minwere applied. With the ultra fast laser beam deflection and laser a smallfocal spot diameter of 21 µm laser dwell times less than 100 nanoseconds were achieved. As a result laser intensities comparable to the q-switched lasers in the range of