Abstract
In the steam-water mixed spray-cleaning technique, droplet impact on the solid surface is the one of the primarily important physical processes. We experimentally studied a droplet impact on a solid plate that moves with a speed ranging from 1 to 50 m/s using high-speed video camera. We observed that high-speed liquid film flows radially outward along the surface just after the impact. In addition, we also observed that liquid turns into corona splash in the cases of higher impact velocities. These flows with large velocities can generate huge shear stress on the solid surface, which may contribute to cleaning. Furthermore, we numerically studied the velocity field development and found that gas flow also spreads obliquely upward. The obliquely upward flow field may also contribute in advecting removed particles or stripped resists away from the original place.
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