High-speed and high-precision measurement of biaxial in-plane displacements: tens of nanometers principle error suppression in microprobe sensors

Abstract

When the microprobe sensor is faced with the demand of high-speed biaxial displacement measurement, due to the characteristics of phase generated carrier (PGC) technology, accompanying optical intensity modulation (AOIM) and unfavorable phase modulation depth (PMD) will bring about the tens of nanometer cyclic nonlinear errors, further hindering high-speed and high-precision measurement. Herein, a light source intensity stabilization system based on semiconductor optical amplifier (SOA) feedback control is achieved to eliminate the error caused by AOIM in the presence of high-frequency and large-amplitude laser modulation. Based on this, the reasons for large nonlinear errors in biaxial measurements and the inability to ensure the stability of the accuracy of multiple measurement axes are methodically examined, and an effective nonlinear error elimination methodology based on the normalized amplitude correction of active temperature scanning is proposed. The continuity and linearity of the temperature scanning are also discussed. The performed experiments show that the above approach is capable of reducing the displacement demodulation error from the nanometer scale to the sub-nanometer scale. Further, the nonlinear error is reduced to within 0.1 nm for both measurement axes and the performance becomes consistent. The dual-axis measurement resolution of the microprobe sensor reaches 0.4 nm and the measurement speed is better than 1.2 m/s with the standard deviation of lower than 0.5 nm.