Abstract
Fabrication of high-resolution 3D structures with laser radiation on the surface of brittle materials has always been a challenging task. Even with femtosecond laser machining, micro-cracks and edge chipping occur. In order to evaluate processing modes optimal both in quality and productivity, we investigated high-speed (50kHz) femtosecond laser processing of BK7 glass with the use of design of experiments and regression analysis. An automated inspection technique was developed to extract quality characteristics of test-objects. A regression model was obtained appropriate to fabricate microchannels with a predefined depth in the range of 1–30µm with average accuracy of 5%. It was found that high quality machining modes are in the range of 0.91–2.27µJ energy pulses, overlap of 53–62%, three and more number of passes. A material removal rate higher than 0.3mm3/min was reached and microfluidic structures were formed based on data obtained.
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