High spatial, temporal and temperature resolution thermal imaging method using Eu(TTA)3 temperature sensitive paint

Abstract

This paper reports on a novel non-contact thermal imaging method with high spatial, temporal and temperature resolution for microdevice evaluation. This method uses a temperature sensitive paint with europium (III) thenoyltrifluoroacetone (Eu(TTA)3). The luminescence of Eu(TTA)3 was excited by a short pulsed UV light; a temporal resolution as high as 0.2 ms was achieved under normal CCD camera observation. Also, a spatial resolution of about 39 µm and a temperature fluctuation of about ±0.2 °C were demonstrated.