Abstract
The spatial resolution, sensitivity, and accuracy are required for light addressable potentiometric sensor (LAPS). The purpose of this work is to provide an approach for the high spatial resolution of the LAPS. The novel LAPS devices were developed and fabricated with ultra-thin Si films on transparent substrates. The 0.5 μm Si film was made on a sapphire substrate, and the 0.5 μm poly-Si film was made on a glass substrate. Those devices were illuminated with the green laser beams in a pH imaging sensor system. These techniques will be able to achieve the submicrometer pH imaging map and densities comparable to those reached with bacteria.
Published Version
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