High spatial resolution hard X-ray microscope using X-ray refractive lens and phase contrast imaging experiments

Abstract

A high spatial resolution X-ray microscope was constructed using an X-ray refractive lens as an objective. The spatial resolution was tested using 18 keV X-ray. A 0.4 μm line and 0.4 μm space tantalum test pattern was successfully resolved. Using the similar setup with the addition of a phase plate, a Zernike type phase-contrast microscopy experiment was carried out for the phase retrieval of the samples. Two-dimensional phase-contrast images were successfully taken for the first time in the hard X-ray region. Images of a gold mesh sample were analyzed and the validity of this method was indicated. An improvement of the lens, however, is required for the precise phase retrieval of the samples.