High Spatial Resolution Auger Electron Spectroscopy

Abstract

During the past several years, Auger electron spectroscopy (AES) has developed from a research curiosity to a practical surface chemical analysis technique. The practical applications of AES have been further increased by combining AES with simultaneous ion sputter etching; this powerful combination of AES and sputter etching is now routinely used to chemical profile thin film and other composite structures with a depth resolution of 10 - 50 Å. AES is sensitive to all elements except hydrogen and helium, and spectra for the majority of the elements are now cataloged in one reference source.AES is performed by electron bombarding a solid surface and energy analyzing the resulting secondary electrons. The secondary electrons that have undergone Auger transitions produce small peaks in the secondary electron distribution function, and the positions of these peaks in energy are used to identify the elements producing the transitions.