Abstract
The results of development and studies of humidity-sensitive elements based on a carbon-nanotube bundle are presented. It has been demonstrated that arrays of nanotubes grown by the low-temperature plasma-chemical method on planar silicon structures have exceptional sensitivity to humidity. The ratio of the structure resistance in dry and humid states is more than 105-fold. Such a high relative resistance change is caused by the character of changes in conductivity of the charge carriers between individual tubes of the bundle upon adsorption of water molecules.
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