Abstract
We have developed a new thin film pyroelectric IR sensor with micro cavity structure, which consists of infra-red absorption layer using carbon-modified resin membrane on the infra-red detecting azea. And we were able to find the best sensor design rule or thermal conductance: G for micro cavity size, and Pt electrode width and thickness. The developing sensor has realized a high-performance of sensing characteristic that responsivity: Rv, and detectivity: D* were 2400V/W, and 6.6×107cm√Hz/W at 20Hz, respectively.In the future, the developing sensor is expected the wide applications for high accurate human detection and non-contact temperature detection.
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