High sensitivity piezoelectric sensors using flexible PZT thick-film for shock tube pressure testing

Abstract

With excellent electromechanical performance and flexibility, piezoelectric lead zirconate titanate (PZT) thick-film fabricated by tape-casting processing has been considered as sensing element in pressure sensor design. The use of flexible PZT thick-film in sensors makes it possible to withstand relatively large deformation or install onto curved surfaces such as those in pipeline pressure sensing, human pulse or heart rate monitor. In this paper, the performance of PZT thick-film pressure sensors is investigated, unimorph structure of pressure sensor was designed and fabricated, and the relationship between generated voltage signals to applied pressures of the model has been analyzed theoretically. Blast wave pressure test was conducted using shock tube setup to test its sensing ability in response to air pressure loading. Different sized sensors were tested and showed nearly linear relationship to blast pressure in the experimental conditions. The voltage sensitivities of the sensor samples tested are several times higher than a commercial pressure sensor.