Abstract
Abstract Aluminum Nitride (AlN) based piezoelectric micromachined ultrasonic transducers (PMUTs) have been the prime choice in acoustic imaging, because it has advantages of high frequency and thus high resolution. However, low piezoelectric constants of AlN gives rises to limitation in transmitting sensitivity. Scandium (Sc) doping method for AlN can be used to improve its piezoelectricity. In this paper, single element PMUT based on ScAlN thin film was proposed and modeled by performing finite element method (FEM). Influence of different electrode configurations on PMUT performance were studied. The results show that, compared with other electrode configurations, PMUT has the best overall performance when the upper electrode is platinum (Pt) and the lower electrode is molybdenum (Mo). In addition, the acoustic field characteristics and its dynamic analysis of PMUT based on ScAlN in water were studied. The investigation results demonstrated that the relative pulse-echo sensitivity level M of PMUT is significantly improved with the increase of Sc doping concentration in AlN thin film. When the Sc concentration is 40%, the M reaches -44 dB, which is 20 dB higher than that without Sc (-64 dB). The PMUT based on the high Sc-doped AlN thin film has a larger effective electromechanical coupling coefficient and sensitivity, which is beneficial to the application in high sensitivity ultrasound imaging.
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