Abstract
A high-sensitivity tri-axis force sensor designed to measure the traction force of a single cell is reported. The developed sensor consists of a micropillar that is supported by a cross-shaped Si structure and a double-layer photoresist cap. The piezoresistors formed on the Si structure allow for the simultaneous measurement of the normal and shear forces acting on the micropillar. Moreover, the cap prevents the cells from contacting the Si structure, which is not desirable when measuring the force acting on the micropillar. The effect of the culture medium on the impedance of the sensor and the noise level of the measurement circuit was evaluated. The temperature effect was compensated using a piezoresistor that does not possess a through-hole underneath. For measurement, inside a culture medium, the resolution of the sensor obtained from the standard deviations of the measured signals was less than 2 nN. Finally, it was demonstrated that the sensor is capable of measuring the traction force in three dimensions generated by an osteosarcoma cell when it detaches from the micropillar under trypsin treatment.
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