Abstract
We present a micro fluxgate magnetic sensor having solenoid coils and racetrack shaped magnetic core, which was designed to decrease the .operating power and magnetic flux leakage. Electroplated copper coils of <TEX>$6\;{\mu}m$</TEX> thickness and the core of <TEX>$3\;{\mu}m$</TEX> thickness were separated by benzocyclobutane (BCB) having a high insulation and good planarization characters. Permalloy <TEX>$(Ni_{0.8}Fe_{0.2})$</TEX> as a magnetic core was also electroplated under 2000 gauss to induce the magnetic anisotropy. The core had the high DC effective permeability of <TEX>$\~1,300$</TEX> and coercive field of <TEX>$\~0.1$</TEX> Oe. The fabricated fluxgate sensor had the very small actual size of <TEX>$3.0\times1.7\;mm^2$</TEX>. The fluxgate sensor with a racetrack shaped core had the high sensitivity .of <TEX>$\~350$</TEX> V/T at excitation condition of 3 <TEX>$V_{P-P}$</TEX> and 2 MHz square wave. When two fluxgates were perpendicularly aligned in terrestrial field, their two-axis output signals were very useful to commercialize an electronic azimuth compass for the portable navigation system.
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