Abstract
In this report the fabrication of an InSb Hall sensor arrays to simultaneously detect multiple superparamagnetic microbeads for biomedical applications is described. One-dimensional InSb Hall sensor arrays with 8 micro-Hall devices were fabricated using photolithography and wet chemical etching. The electrical characteristics and noise spectrum of the micro-Hall sensors were determined by van der Pauw Hall measurements and fast Fourier transform (FFT) spectrum analysis respectively. Results show that the offset voltage of all 8 Hall sensors was small at /spl sim/0.1 mV under a drive current (I/sub H/) of 100 /spl mu/A. The minimum detectable magnetic field is found to be 0.10 mG/(Hz)/sup 1/2/ at I/sub H/ = 1 mA. Calculations showed that the magnetic field from a single ferromagnetic particle with a radius of 50 nm at a distance of 200 nm from the sensor is about 4.4 G. Therefore, the sensitivity of the Hall array micro-Hall sensors is sufficient for detection of magnetic microbeads. In conclusion, the paper showed that real time simultaneous detection of multiple superparamagnetic beads using the InSb-Hall sensor array system is possible. These results suggest that possibility of using two dimensional Hall sensor array biochips for biomedical applications.
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