Abstract
Abstract The aim of this work is to develop an easy-to-manufacture and highly-sensitive conductometric microsensor for indoor air quality (IAQ) monitoring. The sensing material is nanostructured ZnO on Pt electrodes. A Pt heater surrounds the ZnO, so the whole sensor is fabricated on one side of a 2,5x2,5 mm 2 alumina substrate. ZnO nanostructures are grown in-situ over the electrodes, using the Vapour-Solid (VS) approach. The samples have been tested under different concentrations of benzene, formaldehyde and nitrogen dioxide, showing significant response to low concentrations of the three gases.
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