Abstract
In this study, a high-sensitivity and low-hysteresis porous metal–insulator–metal-type capacitive humidity sensor is investigated using a functional polymer mixed with TiO2 microparticles. The humidity sensor consists of an optimally designed porous top electrode, a functional polymer humidity sensitive layer, a bottom electrode, and a glass substrate. The porous top electrode is designed to increase the contact area between the sensing layer and water vapor, leading to high sensitivity and quick response time. The functional polymer mixed with TiO2 microparticles shows excellent hysteresis under a wide humidity-sensing range with good long-term stability. The results show that as the relative humidity ranges from 10% RH to 90% RH, the proposed humidity sensor achieves a high sensitivity of 0.85 pF/% RH and a fast response time of less than 35 s. Furthermore, the sensor shows an ultra-low hysteresis of 0.95% RH at 60% RH, a good temperature dependence, and a stable capacitance value with a maximum of 0.17% RH drift during 120 h of continuous test.
Highlights
Humidity sensors have been widely used in our daily lives and have become increasingly important in different applications such as meteorology, agriculture, smart homes, medical equipment, and biotechnology [1,2,3,4]
The use of a well-designed porous top electrode and a functional polymer mixed with TiO2 microparticles can improve the properties of the humidity sensor; high sensitivity, low hysteresis, fast response time, and wide humidity-sensing range can be realized
The current paper proposes a high-sensitivity and low-hysteresis metal–insulator–metal (MIM)mixed humidity sensor using a well-designed porous top electrode a functional polymer and withcapacitive
Summary
Humidity sensors have been widely used in our daily lives and have become increasingly important in different applications such as meteorology, agriculture, smart homes, medical equipment, and biotechnology [1,2,3,4]. Various types of humidity sensors are available, based on different measurement principles such as resistive, capacitive, optical, acoustic, and thermal techniques [5,6,7,8] Among these several types of humidity sensors, the capacitive devices are preferred owing to their high sensitivity, linearity, accuracy, fast response time, and negligible temperature [9,10,11,12]. The use of a well-designed porous top electrode and a functional polymer mixed with TiO2 microparticles can improve the properties of the humidity sensor; high sensitivity, low hysteresis, fast response time, and wide humidity-sensing range can be realized
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